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The Discharge Characteristics of Dual-Frequency Capacitively Coupled Ar/Ch4 Plasma Diagnostics by Optical Emission Spectroscopy

https://doi.org/10.2139/ssrn.4775740
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Metrology of non-thermal capacitively coupled N2–Ar mixture plasma
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Optimization and control of a plasma carburizing process by means of optical emission spectroscopy
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Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition
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Visible continuum radiation in high-pressure argon and argon–mercury plasmas
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Chemical Reaction Studies in CH4/Ar and CH4/N2 Gas Mixtures of a Dielectric Barrier Discharge
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Nitrogen effect on the dust presence and behavior in a radio frequency CH4∕N2 discharge
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Measurements of swarm parameters and derived electron collision cross sections in methane
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Optical emission characterization of CH4+H2 discharges for diamond deposition
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Concentration of atomic hydrogen in the ground state in a CH4-H2 microwave plasma
inferredcites →https://doi.org/10.1063/1.4999401openalex-extracted
Optical and electrical properties of capacitive coupled radio frequency Ar-H2 mixture discharge at the low pressure
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Optical emission spectroscopy of 50 Hz pulsed dc nitrogen–hydrogen plasma in the presence of active screen cage
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Absolute measurements of the continuum radiation to determine the electron density in a microwave-induced argon plasma
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A novel method of using the OES line ratio to determine the spatially resolved atomic density in low-temperature plasmas and its application in carbon and aluminium atoms in capacitively coupled plasmas
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Online databases and computational tools for non-LTE spectroscopy
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Radiative transfer of a molecular S2B X spectrum using semiclassical and quantum-mechanical radiation coefficients
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Electrostatic modelling of dual frequency rf plasma discharges
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Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H2/C2H2and Ar/H2/CH4plasmas used for the synthesis of nanocarbon structures
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A spectroscopic study of active species in DC and HF flowing discharges in - and Ar - - mixtures
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Temporal evolution of electron density and temperature in low pressure transient Ar/N2 plasmas estimated by optical emission spectroscopy
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On diagnostics of annular-shape radio-frequency plasma jet operating in argon in atmospheric conditions
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Discharge characteristic of very high frequency capacitively coupled argon plasma*
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Measurements of electron number density and temperature in a supersonic plasma jet by optical emission spectroscopy
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Optical Emission Spectroscopic Analysis of Plasma Parameters in Cadmium by Nd: YAG laser Technique
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Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
inferredcites →https://doi.org/10.1109/tps.1986.4316510openalex-extracted
A Continuum Model of DC and RF Discharges
inferredcites →https://doi.org/10.1109/tps.2003.815471openalex-extracted
Study on the dual frequency capacitively coupled plasmas by the particle-in-cell/Monte Carlo method
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Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled
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