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Thermally and structurally robust design of through-glass via arrays via multi-objective optimization and machine learning-based geometry prediction

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Applied Regression Analysis
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Robust Estimation of a Location Parameter
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Stochastic Gradient Descent Tricks
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Rapid formation of high aspect ratio through holes in thin glass substrates using an engineered, QCW laser approach
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Annealing temperature effect on the Cu-Cu bonding energy for 3D-IC integration
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Effects of cell quality in grid boundary layer on the simulated flow around a square cylinder
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Analytical and finite element modeling of through glass via thermal stress
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Effects of dimension parameters and defect on TSV thermal behavior for 3D IC packaging
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Fabrication and analysis of through-glass vias for glass-based electronic packaging using an ultrashort pulsed laser
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Thermal instability of nanocrystalline Cu enables Cu-Cu direct bonding in interconnects at low temperature
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A finite volume numerical approach for predicting heat transfer in presence of thermal contact resistance
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Precision glass machining, drilling and profile cutting by short pulse lasers
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Stacked generalization
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Wafer bonding for microsystems technologies
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Random Forests
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Ridge Regression: Biased Estimation for Nonorthogonal Problems
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3-D Thin film interposer based on TGV (Through Glass Vias): An alternative to Si-interposer
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Multi-Stack Wafer Bonding Demonstration utilizing Cu to Cu Hybrid Bonding and TSV enabling Diverse 3D Integration
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An Advanced CuCu Hybrid Bonding For Novel Stacked CMOS Image Sensor
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The Scaling of Cu-Cu Hybrid Bonding For High Density 3D Chip Stacking
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High-Density Through Silicon Vias for 3-D LSIs
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Nearest neighbor pattern classification
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Power Delivery Design for 3-D ICs Using Different Through-Silicon Via (TSV) Technologies
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Regularization and Variable Selection Via the Elastic Net
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Regression Shrinkage and Selection Via the Lasso
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Tutorial on forming through-silicon vias
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Ultrahigh-speed laser drilling of transparent materials via transient electronic excitation
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Combined Surface Activated Bonding Technique for Hydrophilic SiO2-SiO2 and Cu-Cu Bonding
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Classification And Regression Trees
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Very large spot size effect in nanosecond laser drilling efficiency of silicon
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Optimizing laser-induced deep etching technique for micromachining of NXT glass
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Enhanced throughput and clean laser drilling with a sacrificial polymer layer
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Low Temperature Wafer Direct Bonding Using Wet Chemical Treatment
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Critical Issues of TSV and 3D IC Integration
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Laser Drilling of High-Density Through Glass Vias (TGVs) for 2.5D and 3D Packaging
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