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Introducing crystalline rare‐earth oxides into Si technologies

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/pssa.200673232openalex-snapshot
Synthesis of localized 2D‐layers of silicon nanoparticles embedded in a SiO2 layer by a stencil‐masked ultra‐low energy ion implantation process
inferredcites →https://doi.org/10.1007/11499893_18openalex-snapshot
Electronic Structure and Band Offsetsof Lanthanide Oxides
inferredcites →https://doi.org/10.1007/11499893_7openalex-snapshot
Molecular Beam Epitaxy of Rare-Earth Oxides
inferredcites →https://doi.org/10.1016/j.mee.2007.04.092openalex-snapshot
Integration of functional epitaxial oxides into silicon: from high-k application to nanostructures
inferredcites →https://doi.org/10.1016/j.microrel.2004.11.037openalex-snapshot
Dielectric properties of two phases of crystalline lutetium oxide
inferredcites →https://doi.org/10.1016/j.microrel.2007.01.018openalex-snapshot
Electrical characterization of crystalline Gd2O3 gate dielectric MOSFETs fabricated by damascene metal gate technology
inferredcites →https://doi.org/10.1016/j.mseb.2003.10.086openalex-snapshot
Pr2O3/Si(0 0 1) interface reactions and stability
inferredcites →https://doi.org/10.1016/j.mser.2003.12.002openalex-snapshot
Synthesis and properties of epitaxial electronic oxide thin-film materials
inferredcites →https://doi.org/10.1016/j.mser.2006.04.001openalex-snapshot
Electrical properties of high-κ gate dielectrics: Challenges, current issues, and possible solutions
inferredcites →https://doi.org/10.1016/j.sse.2007.02.008openalex-snapshot
Investigation of MOS capacitors and SOI–MOSFETs with epitaxial gadolinium oxide (Gd2O3) and titanium nitride (TiN) electrodes
inferredcites →https://doi.org/10.1016/j.susc.2004.12.016openalex-snapshot
Density functional theory studies of the structure and electronic structure of pure and defective low index surfaces of ceria
inferredcites →https://doi.org/10.1016/s0040-6090(98)00533-1openalex-snapshot
Silicon MIS structures using samarium oxide films
inferredcites →https://doi.org/10.1016/s0168-1273(97)24004-3openalex-snapshot
Chapter 159 Surface magnetism of the lanthanides
inferredcites →https://doi.org/10.1021/cr940055hopenalex-snapshot
The Binary Rare Earth Oxides
inferredcites →https://doi.org/10.1038/nmat1197openalex-snapshot
The origin of highly efficient selective emission in rare-earth oxides for thermophotovoltaic applications
inferredcites →https://doi.org/10.1063/1.116085openalex-snapshot
A silicon nanocrystals based memory
inferredcites →https://doi.org/10.1063/1.1352688openalex-snapshot
Properties of high κ gate dielectrics Gd2O3 and Y2O3 for Si
inferredcites →https://doi.org/10.1063/1.1361065openalex-snapshot
High-κ gate dielectrics: Current status and materials properties considerations
inferredcites →https://doi.org/10.1063/1.1385803openalex-snapshot
Ultrathin (<4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits
inferredcites →https://doi.org/10.1063/1.1413239openalex-snapshot
Characteristics of electron-beam-gun-evaporated Er2O3 thin films as gate dielectrics for silicon
inferredcites →https://doi.org/10.1063/1.1471943openalex-snapshot
Photoemission and ab initio theoretical study of interface and film formation during epitaxial growth and annealing of praseodymium oxide on Si(001)
inferredcites →https://doi.org/10.1063/1.1828600openalex-snapshot
Energy-band diagram of metal/Lu2O3/silicon structures
inferredcites →https://doi.org/10.1063/1.1853522openalex-snapshot
Ca F 2 ∕ Si ∕ Ca F 2 resonant tunneling diodes grown by B surfactant-mediated epitaxy
inferredcites →https://doi.org/10.1063/1.2181282openalex-snapshot
Electronic properties of the Zr–ZrO2–SiO2–Si(100) gate stack structure
inferredcites →https://doi.org/10.1063/1.2188051openalex-snapshot
Interface formation during molecular beam epitaxial growth of neodymium oxide on silicon
inferredcites →https://doi.org/10.1063/1.2192979openalex-snapshot
Cooperative solid-vapor-phase epitaxy: An approach for fabrication of single-crystalline insulator/Si/insulator nanostructures
inferredcites →https://doi.org/10.1063/1.2194227openalex-snapshot
Impact of oxygen supply during growth on the electrical properties of crystalline Gd2O3 thin films on Si(001)
inferredcites →https://doi.org/10.1063/1.2198518openalex-snapshot
Crystalline ternary rare earth oxide with capacitance equivalent thickness below 1nm for high-K application
inferredcites →https://doi.org/10.1063/1.2339562openalex-snapshot
Enhancing memory efficiency of Si nanocrystal floating gate memories with high-κ gate oxides
inferredcites →https://doi.org/10.1063/1.2360209openalex-snapshot
Impact of Si substrate orientations on electrical properties of crystalline Gd2O3 thin films for high-K application
inferredcites →https://doi.org/10.1063/1.2713142openalex-snapshot
Influence of interface layer composition on the electrical properties of epitaxial Gd2O3 thin films for high-K application
inferredcites →https://doi.org/10.1063/1.2721145openalex-snapshot
Memory effects in metal-oxide-semiconductor capacitors incorporating dispensed highly monodisperse 1nm silicon nanoparticles
inferredcites →https://doi.org/10.1063/1.2746419openalex-snapshot
Investigation of the electronic structure at interfaces of crystalline and amorphous Gd2O3 thin layers with silicon substrates of different orientations
inferredcites →https://doi.org/10.1063/1.2757150openalex-snapshot
Conduction band energies and hot-electron transport characteristics of epitaxial Sc2O3∕Si (111) studied by ballistic electron emission microscopy and internal photoemission
inferredcites →https://doi.org/10.1088/0034-4885/69/2/r02openalex-snapshot
High dielectric constant gate oxides for metal oxide Si transistors
inferredcites →https://doi.org/10.1109/20.908580openalex-snapshot
Spintronics: a new paradigm for electronics for the new millennium
inferredcites →https://doi.org/10.1116/1.1589516openalex-snapshot
Towards understanding epitaxial growth of alternative high-K dielectrics on Si(001): Application to praseodymium oxide
inferredcites →https://doi.org/10.1116/1.2213266openalex-snapshot
Fabrication of single-crystalline insulator∕Si∕insulator nanostructures
inferredcites →https://doi.org/10.1143/jjap.39.l964openalex-snapshot
Epitaxial Growth and Electrical Characteristics of CaF2/Si/CaF2 Resonant Tunneling Diode Structures Grown on Si(111) 1°-off Substrate
inferredcites →https://doi.org/10.1143/jjap.44.l836openalex-snapshot
Electron Injection into Si Nanodot Fabricated by Side-Wall Plasma Enhanced Chemical Vapor Deposition
inferredcites →https://doi.org/10.1147/rd.433.0327openalex-snapshot
Modeling and characterization of quantization, polysilicon depletion, and direct tunneling effects in MOSFETs with ultrathin oxides
inferredcites →https://doi.org/10.1209/epl/i2002-00165-4openalex-snapshot
From classical to quantum spintronics: Theory of coherent spin injection and spin valve phenomena
inferredcites →https://doi.org/10.1511/2001.6.516openalex-snapshot
Spintronics
inferredcites →https://doi.org/10.1557/jmr.1996.0350openalex-snapshot
Thermodynamic stability of binary oxides in contact with silicon

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4573816openalex-extracted
Highly Oriented Crystalline Si on Epitaxial Gd2o3/Si(111) Substrate Using Low-Cost Rf Sputtering for Silicon on Insulator Application
inferred← citeshttps://doi.org/10.1002/aelm.202300730openalex-snapshot
LaAlO 3 /SrTiO 3 Heterointerface: 20 Years and Beyond
inferred← citeshttps://doi.org/10.1002/lpor.71708openalex-snapshot
High-gain optical amplification and lasing from erbium-doped single-crystal films epitaxially grown on silicon
inferred← citeshttps://doi.org/10.1002/pssr.201600443openalex-snapshot
Dual‐functional crystalline BeO layer in enhancement‐mode ZnO/Si thin film transistors
inferred← citeshttps://doi.org/10.1007/978-1-4614-9320-4_2openalex-snapshot
Critical Issues in Oxide-Semiconductor Heteroepitaxy
inferred← citeshttps://doi.org/10.1007/978-3-642-10559-3_9openalex-snapshot
Nanotechnology for Computers, Memories, and Hard Disks
inferred← citeshttps://doi.org/10.1007/s10854-011-0368-zopenalex-snapshot
Effects of post-deposition annealing temperature and ambient on RF magnetron sputtered Sm2O3 gate on n-type silicon substrate
inferred← citeshttps://doi.org/10.1007/s11664-020-08392-4openalex-snapshot
Ion-Implanted Epitaxially Grown Gd2O3 on Silicon with Improved Electrical Properties
inferred← citeshttps://doi.org/10.1016/b978-0-08-099929-6.00007-5openalex-snapshot
Silicon–Insulator Interface Barriers
inferred← citeshttps://doi.org/10.1016/b978-0-12-387839-7.00018-xopenalex-snapshot
Epitaxial systems combining oxides and semiconductors
inferred← citeshttps://doi.org/10.1016/b978-0-12-812136-8.00018-9openalex-snapshot
Epitaxial Systems Combining Oxides and Semiconductors
inferred← citeshttps://doi.org/10.1016/j.jcrysgro.2008.10.104openalex-snapshot
Control of thick single crystal erbium oxide growth on (111) silicon
inferred← citeshttps://doi.org/10.1016/j.jcrysgro.2014.04.015openalex-snapshot
Deposition of GaN films on crystalline rare earth oxides by MOCVD
inferred← citeshttps://doi.org/10.1016/j.jcrysgro.2017.10.019openalex-snapshot
Growth of epitaxially stabilized, non-cubic Gd2O3 on silicon(1 1 1) substrates
inferred← citeshttps://doi.org/10.1016/j.mee.2009.03.107openalex-snapshot
Growth temperature dependence of epitaxial Gd2O3 films on Si(111)
inferred← citeshttps://doi.org/10.1016/j.mee.2011.03.045openalex-snapshot
Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition
inferred← citeshttps://doi.org/10.1016/j.mee.2013.03.094openalex-snapshot
Electrical characterization of gadolinium oxide deposited by high pressure sputtering with in situ plasma oxidation
inferred← citeshttps://doi.org/10.1016/j.mee.2015.04.061openalex-snapshot
Single-crystal atomic layer deposited Y2O3 on GaAs(0 0 1) – growth, structural, and electrical characterization
inferred← citeshttps://doi.org/10.1016/j.mee.2017.04.048openalex-snapshot
Single-crystal hexagonal perovskite YAlO3 epitaxially on GaAs(111)A and (001) using atomic layer deposition
inferred← citeshttps://doi.org/10.1016/j.mssp.2011.02.001openalex-snapshot
Sm2O3 gate dielectric on Si substrate
inferred← citeshttps://doi.org/10.1016/j.mssp.2026.110931openalex-snapshot
Epitaxial growth of Ge1−xSnx on Ge-buffered Gd2O3/Si(111), by molecular beam epitaxy
inferred← citeshttps://doi.org/10.1016/j.physe.2016.02.002openalex-snapshot
Molecular beam epitaxy deposition of Gd2O3 thin films on SrTiO3 (100) substrate
inferred← citeshttps://doi.org/10.1016/j.pmatsci.2011.01.012openalex-snapshot
Integrations and challenges of novel high-k gate stacks in advanced CMOS technology
inferred← citeshttps://doi.org/10.1016/j.scitotenv.2023.163259openalex-snapshot
Cytotoxicity and hemolysis of rare earth ions and nanoscale/bulk oxides (La, Gd, and Yb): Interaction with lipid membranes and protein corona formation
inferred← citeshttps://doi.org/10.1016/j.spmi.2017.02.050openalex-snapshot
In situ study on the thermal stability and interfaces properties of Er 2 O 3 /Al 2 O 3 /Si multi stacked films by X-ray photoelectron spectroscopy
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2011.12.031openalex-snapshot
Process–structure–property relations of micron thick Gd2O3 films deposited by reactive electron-beam physical vapor deposition (EB-PVD)
inferred← citeshttps://doi.org/10.1016/j.tsf.2021.138732openalex-snapshot
Epitaxial Ge-Gd 2 O 3 on Si(111) substrate by sputtering for germanium-on-insulator applications
inferred← citeshttps://doi.org/10.1016/j.tsf.2021.139047openalex-snapshot
Radio frequency power controlled Gd2O3 crystal phase transition from monoclinic to cubic
inferred← citeshttps://doi.org/10.1016/j.tsf.2022.139561openalex-snapshot
Investigation of the temperature stability of germanium-rich SiGe layers on Si(111) substrates
inferred← citeshttps://doi.org/10.1016/j.tsf.2023.139907openalex-snapshot
Phase evolution in epitaxial Gd2O3 due to anneal temperature for silicon on insulator application
inferred← citeshttps://doi.org/10.1016/j.tsf.2024.140272openalex-snapshot
Highly oriented crystalline si on epitaxial Gd2O3/Si(111) substrate using low-cost Radio Frequency sputtering for Silicon on Insulator application
inferred← citeshttps://doi.org/10.1016/j.tsf.2024.140529openalex-snapshot
Engineering wafer scale single-crystalline Si growth on epitaxial Gd2O3/Si(111) substrate using radio frequency sputtering for silicon on insulator application
inferred← citeshttps://doi.org/10.1016/j.tsf.2024.140559openalex-snapshot
Structural and electrical characterization of phase evolution in epitaxial Gd2O3 due to anneal temperature for silicon on insulator application
inferred← citeshttps://doi.org/10.1021/acs.cgd.6c00557openalex-snapshot
Orientation-Dependent Domain Structure and Buffer Layer Functionality of Epitaxial Bixbyite Sc2O3 Thin Films
inferred← citeshttps://doi.org/10.1021/acs.jpca.5b07209openalex-snapshot
Photofragmentation of the Gas-Phase Lanthanum Isopropylcyclopentadienyl Complex: Computational Modeling vs Experiment
inferred← citeshttps://doi.org/10.1021/acs.jpcc.5c04779openalex-snapshot
Intralayer Exciton Formation in Dielectric-Defined Type-I Heterostructures of 2D MoSe 2 Monolayers
inferred← citeshttps://doi.org/10.1021/acsami.8b09264openalex-snapshot
Selective Growth of Interface Layers from Reactions of Sc(MeCp)2(Me2pz) with Oxide Substrates
inferred← citeshttps://doi.org/10.1021/acsanm.0c03459openalex-snapshot
Three-Dimensional Integration of Functional Oxides and Crystalline Silicon for Optical Neuromorphic Computing Using Nanometer-Scale Oxygen Scavenging Barriers
inferred← citeshttps://doi.org/10.1021/cm2020862openalex-snapshot
Atomic Layer Deposition of Gd2O3 and Dy2O3: A Study of the ALD Characteristics and Structural and Electrical Properties
inferred← citeshttps://doi.org/10.1021/cr9001275openalex-snapshot
High-k Organic, Inorganic, and Hybrid Dielectrics for Low-Voltage Organic Field-Effect Transistors
inferred← citeshttps://doi.org/10.1039/c2dt31219kopenalex-snapshot
Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors
inferred← citeshttps://doi.org/10.1039/c3tc30401aopenalex-snapshot
Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties
inferred← citeshttps://doi.org/10.1039/d1ra00476jopenalex-snapshot
Formation of self-assembled Gd 2 O 3 nanowire-like structures during epitaxial growth on Si(001)
inferred← citeshttps://doi.org/10.1039/d5tc01580dopenalex-snapshot
Engineering charge transfer doping of MoSe 2 monolayers via epitaxial orientation-dependent surface electron accumulation in high- κ dielectric Gd 2 O 3 thin films
inferred← citeshttps://doi.org/10.1063/1.3009206openalex-snapshot
Effect of domain boundaries on the electrical properties of crystalline Gd2O3 thin films
inferred← citeshttps://doi.org/10.1063/1.3264674openalex-snapshot
The thermal stability of Pt/epitaxial Gd2O3/Si stacks and its dependence on heat-treatment ambient
inferred← citeshttps://doi.org/10.1063/1.3318260openalex-snapshot
Effect of Ge passivation on interfacial properties of crystalline Gd2O3 thin films grown on Si substrates
inferred← citeshttps://doi.org/10.1063/1.3573036openalex-snapshot
Trap-assisted conduction in Pt-gated Gd2O3/Si capacitors
inferred← citeshttps://doi.org/10.1063/1.3646104openalex-snapshot
Impact of carbon incorporation into epitaxial Gd2O3 thin films on silicon: An experimental study on electrical properties
inferred← citeshttps://doi.org/10.1063/1.3685508openalex-snapshot
Using Zintl-Klemm intermetallics in oxide-semiconductor heteroepitaxy
inferred← citeshttps://doi.org/10.1063/1.4727893openalex-snapshot
Strain-induced effects on the dielectric constant for thin, crystalline rare earth oxides on silicon
inferred← citeshttps://doi.org/10.1063/1.4768295openalex-snapshot
Defect induced mobility enhancement: Gadolinium oxide (100) on Si(100)
inferred← citeshttps://doi.org/10.1063/1.4775688openalex-snapshot
Improving dielectric properties of epitaxial Gd2O3 thin films on silicon by nitrogen doping
inferred← citeshttps://doi.org/10.1063/1.4804245openalex-snapshot
Investigation of band offsets and direct current leakage properties of nitrogen doped epitaxial Gd2O3 thin films on Si
inferred← citeshttps://doi.org/10.1063/1.4807588openalex-snapshot
Effective control on flat band voltage of epitaxial lanthanide oxide based metal oxide semiconductor capacitors by interfacial carbon
inferred← citeshttps://doi.org/10.1063/1.4824422openalex-snapshot
Epitaxial Gd2O3 on strained Si1−xGex layers for next generation complementary metal oxide semiconductor device application
inferred← citeshttps://doi.org/10.1063/1.4861470openalex-snapshot
Superior dielectric properties for template assisted grown (100) oriented Gd2O3 thin films on Si(100)
inferred← citeshttps://doi.org/10.1063/1.4870585openalex-snapshot
Ultrathin, epitaxial cerium dioxide on silicon
inferred← citeshttps://doi.org/10.1063/1.4905356openalex-snapshot
The influence of carbon doping on the performance of Gd2O3 as high-k gate dielectric
inferred← citeshttps://doi.org/10.1063/1.4958301openalex-snapshot
Strain-induced phase variation and dielectric constant enhancement of epitaxial Gd2O3
inferred← citeshttps://doi.org/10.1063/1.4964431openalex-snapshot
Formation and properties of high-dose nitrogen implanted epitaxially grown Gd2O3 on silicon
inferred← citeshttps://doi.org/10.1063/1.5020026openalex-snapshot
Molecular beam epitaxy and defect structure of Ge (111)/epi-Gd2O3 (111)/Si (111) heterostructures
inferred← citeshttps://doi.org/10.1063/1.5054810openalex-snapshot
Epitaxial integration of high-mobility La-doped BaSnO3 thin films with silicon
inferred← citeshttps://doi.org/10.1063/5.0007793openalex-snapshot
Tuning of structural and dielectric properties of Gd2O3 grown on Si(001)
inferred← citeshttps://doi.org/10.1063/5.0010833openalex-snapshot
Chemically vapor deposited Eu3+:Y2O3 thin films as a material platform for quantum technologies
inferred← citeshttps://doi.org/10.1080/10420150.2022.2077204openalex-snapshot
Optical-electrical characteristics of Al/Gd2O3/(CZ-pSi)/Al diodes under gamma ray irradiation
inferred← citeshttps://doi.org/10.1088/0022-3727/43/27/275501openalex-snapshot
Natural radioactivity consideration for high-κ dielectrics and metal gates choice in nanoelectronic devices
inferred← citeshttps://doi.org/10.1088/0268-1242/24/4/045021openalex-snapshot
Crystal structure and strain state of molecular beam epitaxial grown Gd 2 O 3 on Si(1 1 1) substrates: a diffraction study
inferred← citeshttps://doi.org/10.1088/0268-1242/25/10/105001openalex-snapshot
Downscaling of defect-passivated Gd2O3thin films on p-Si(0 0 1) wafers grown by H2O-assisted atomic layer deposition
inferred← citeshttps://doi.org/10.1088/0268-1242/26/12/125005openalex-snapshot
Designer hydride routes to ‘Si–Ge’/(Gd,Er)2O3/Si(1 1 1) semiconductor-on-insulator heterostructures
inferred← citeshttps://doi.org/10.1088/1361-6463/aad176openalex-snapshot
Wafer-scale all-epitaxial GeSn-on-insulator on Si(1 1 1) by molecular beam epitaxy
inferred← citeshttps://doi.org/10.1088/1361-6463/ac3f0dopenalex-snapshot
Improvement of crystal quality and surface morphology of Ge/Gd2O3/Si(111) epitaxial layers by cyclic annealing and regrowth
inferred← citeshttps://doi.org/10.1088/1361-6641/ac2962openalex-snapshot
Interfacial layer formation during the growth of Gd 2 O 3 on Si(001) and its thermal stability
inferred← citeshttps://doi.org/10.1103/physrevb.88.045314openalex-snapshot
Epitaxial Zintl aluminide SrAl 4 grown on a LaAlO 3 substrate
inferred← citeshttps://doi.org/10.1107/s2052520618017869openalex-snapshot
Influence of nanostructure formation on the crystal structure and morphology of epitaxially grown Gd2O3 on Si(001)
inferred← citeshttps://doi.org/10.1109/icscs.2009.5414203openalex-snapshot
Effect of domain boundaries on dielectric properties of lanthanide oxide based gate dielectrics
inferred← citeshttps://doi.org/10.1109/radecs.2011.6131397openalex-snapshot
Alpha-Soft Error Rate due to new generations of high-κ gate oxides and metal gate electrodes in a 32 nm node
inferred← citeshttps://doi.org/10.1116/1.4793264openalex-snapshot
Effects of substrate doping on Gd2O3(100)/Si(100) heterostructure
inferred← citeshttps://doi.org/10.1116/1.4876122openalex-snapshot
Epitaxial, well-ordered ceria/lanthana high-k gate dielectrics on silicon
inferred← citeshttps://doi.org/10.1116/1.4882173openalex-snapshot
Monolithic integration of rare-earth oxides and semiconductors for on-silicon technology
inferred← citeshttps://doi.org/10.1116/11.20080703openalex-snapshot
Gd2O3 Nanostructured Thin Films Analyzed by XPS
inferred← citeshttps://doi.org/10.1134/s1063782610050027openalex-snapshot
Optical and dielectric characteristics of the rare-earth metal oxide Lu2O3
inferred← citeshttps://doi.org/10.1364/oe.389765openalex-snapshot
Epitaxial single-crystal rare-earth oxide in horizontal slot waveguide for silicon-based integrated active photonic devices
inferred← citeshttps://doi.org/10.1364/oe.437868openalex-snapshot
Low-loss erbium-incorporated rare-earth oxide waveguides on Si with bound states in the continuum and the large optical signal enhancement in them
inferred← citeshttps://doi.org/10.15541/jim20140110openalex-snapshot
Applications of Scanning Transmission Electron Microscopy (STEM) in the New Generation of High-K Gate Dielectrics
inferred← citeshttps://doi.org/10.1557/jmr.2017.22openalex-snapshot
Epitaxial lanthanide oxide thin films on Si for high-k gate dielectric application: Growth optimization and defect passivation
inferred← citeshttps://doi.org/10.2139/ssrn.4841438openalex-snapshot
Engineering Wafer Scale Single-Crystalline Si Growth on Epitaxial Gd2o3/Si(111) Substrate Using Rf Sputtering for Soi Application
inferred← citeshttps://doi.org/10.2320/matertrans.m2009147openalex-snapshot
Crystalline Nanoscale M2O3 (M=Gd, Nd) Thin Films Grown by Molecular Beam Epitaxy on Si(111)
inferred← citeshttps://doi.org/10.32657/10356/68931openalex-snapshot
Novel high-k dielectrics for nanoelectronics
inferred← citeshttps://doi.org/10.70675/7292ff65z2a17z4309zbcf7zbfecd5246cbfopenalex-snapshot
Epitaxy of crystalline oxides for functional materials integration on silicon
inferred← citeshttps://doi.org/10.7567/apex.9.081501openalex-snapshot
Low interfacial trap density and high-temperature thermal stability in atomic layer deposited single crystal Y2O3/n-GaAs(001)
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