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Engineering Wafer Scale Single-Crystalline Si Growth on Epitaxial Gd2o3/Si(111) Substrate Using Rf Sputtering for Soi Application

https://doi.org/10.2139/ssrn.4841438
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inferredcites →https://doi.org/10.1002/pssa.200723509openalex-extracted
Introducing crystalline rare‐earth oxides into Si technologies
inferredcites →https://doi.org/10.1007/s003390051038openalex-extracted
The critical thickness of silicon-germanium layers grown by liquid phase epitaxy
inferredcites →https://doi.org/10.1016/j.apmt.2021.101143openalex-extracted
In situ implementation of silicon epitaxial layer on amorphous SiO2 using reduced-pressure chemical vapor deposition
inferredcites →https://doi.org/10.1016/j.ceramint.2014.09.053openalex-extracted
Synthesis and characterization of Gd(OH)3 and Gd2O3 nanorods
inferredcites →https://doi.org/10.1016/j.mee.2009.03.107openalex-extracted
Growth temperature dependence of epitaxial Gd2O3 films on Si(111)
inferredcites →https://doi.org/10.1016/j.mejo.2007.11.007openalex-extracted
Silicon in functional epitaxial oxides: A new group of nanostructures
inferredcites →https://doi.org/10.1016/j.tsf.2009.09.139openalex-extracted
Single-crystalline Si grown on single-crystalline Gd2O3 by modified solid-phase epitaxy
inferredcites →https://doi.org/10.1016/j.tsf.2021.138732openalex-extracted
Epitaxial Ge-Gd 2 O 3 on Si(111) substrate by sputtering for germanium-on-insulator applications
inferredcites →https://doi.org/10.1016/j.tsf.2021.139047openalex-extracted
Radio frequency power controlled Gd2O3 crystal phase transition from monoclinic to cubic
inferredcites →https://doi.org/10.1016/j.tsf.2023.139907openalex-extracted
Phase evolution in epitaxial Gd2O3 due to anneal temperature for silicon on insulator application
inferredcites →https://doi.org/10.1016/j.tsf.2024.140272openalex-extracted
Highly oriented crystalline si on epitaxial Gd2O3/Si(111) substrate using low-cost Radio Frequency sputtering for Silicon on Insulator application
inferredcites →https://doi.org/10.1016/s0169-4332(96)00202-4openalex-extracted
Influence of surface reconstruction on MBE growth of layered GaSe on Si(111) substrates
inferredcites →https://doi.org/10.1021/acsami.6b04552openalex-extracted
Nanometer-Thick Gold on Silicon as a Proxy for Single-Crystal Gold for the Electrodeposition of Epitaxial Cuprous Oxide Thin Films
inferredcites →https://doi.org/10.1063/1.126217openalex-extracted
Epitaxial Y2O3 films grown on Si(111) by pulsed-laser ablation
inferredcites →https://doi.org/10.1063/1.1389509openalex-extracted
Epitaxial growth of Pr2O3 on Si(111) and the observation of a hexagonal to cubic phase transition during postgrowth N2 annealing
inferredcites →https://doi.org/10.1063/1.2192979openalex-extracted
Cooperative solid-vapor-phase epitaxy: An approach for fabrication of single-crystalline insulator/Si/insulator nanostructures
inferredcites →https://doi.org/10.1063/1.4775688openalex-extracted
Improving dielectric properties of epitaxial Gd2O3 thin films on silicon by nitrogen doping
inferredcites →https://doi.org/10.1063/1.5020026openalex-extracted
Molecular beam epitaxy and defect structure of Ge (111)/epi-Gd2O3 (111)/Si (111) heterostructures
inferredcites →https://doi.org/10.1088/0268-1242/23/3/035010openalex-extracted
Stability of crystalline Gd2O3thin films on silicon during rapid thermal annealing
inferredcites →https://doi.org/10.1088/0957-4484/20/47/475604openalex-extracted
Encapsulated solid phase epitaxy of a Ge quantum well embedded in an epitaxial rare earth oxide
inferredcites →https://doi.org/10.1109/commad.2008.4802118openalex-extracted
Integration of low dimensional crystalline Si into functional epitaxial oxides for next generation solar cell application
inferredcites →https://doi.org/10.1109/icscs.2009.5414206openalex-extracted
Stability of crystalline Gd2O3 thin films on silicon during post-growth processing
inferredcites →https://doi.org/10.1109/stysw.2010.5714177openalex-extracted
Critical thickness of epitaxial thin films using Finite Element Method
inferredcites →https://doi.org/10.1109/ted.2020.3002878openalex-extracted
Effects of Scaling on Analog FoMs of UTBB FD-SOI MOS Transistors: A Detailed Analysis
inferredcites →https://doi.org/10.1116/1.2213266openalex-extracted
Fabrication of single-crystalline insulator∕Si∕insulator nanostructures
inferredcites →https://doi.org/10.1116/1.4882173openalex-extracted
Monolithic integration of rare-earth oxides and semiconductors for on-silicon technology
inferredcites →https://doi.org/10.1149/1.2114325openalex-extracted
Silicon Layers Grown by Differential Molecular Beam Epitaxy
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