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Cooperative solid-vapor-phase epitaxy: An approach for fabrication of single-crystalline insulator/Si/insulator nanostructures

https://doi.org/10.1063/1.2192979

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/j.mser.2003.12.002openalex-snapshot

Synthesis and properties of epitaxial electronic oxide thin-film materials

inferredcites →https://doi.org/10.1016/s0169-4332(03)00227-7openalex-snapshot

Surfactant enhanced growth of thin Si films on CaF2/Si(1 1 1)

inferredcites →https://doi.org/10.1063/1.107325openalex-snapshot

Initial stages of native oxide growth on hydrogen passivated Si(111) surfaces studied by scanning tunneling microscopy

inferredcites →https://doi.org/10.1063/1.126217openalex-snapshot

Epitaxial Y2O3 films grown on Si(111) by pulsed-laser ablation

inferredcites →https://doi.org/10.1063/1.1290158openalex-snapshot

Epitaxial growth of laminar crystalline silicon on CaF2

inferredcites →https://doi.org/10.1063/1.1337920openalex-snapshot

Structural characteristics of Y2O3 films grown on oxidized Si(111) surface

inferredcites →https://doi.org/10.1063/1.1389509openalex-snapshot

Epitaxial growth of Pr2O3 on Si(111) and the observation of a hexagonal to cubic phase transition during postgrowth N2 annealing

inferredcites →https://doi.org/10.1063/1.1445465openalex-snapshot

Lattice-matched, epitaxial, silicon-insulating lanthanum yttrium oxide heterostructures

inferredcites →https://doi.org/10.1063/1.1527715openalex-snapshot

Growth and characterization of epitaxial Si/(LaxY1−x)2O3/Si heterostructures

inferredcites →https://doi.org/10.1063/1.1637716openalex-snapshot

Epitaxial silicon and germanium on buried insulator heterostructures and devices

inferredcites →https://doi.org/10.1063/1.1801157openalex-snapshot

Structural, optical, and electrical characterization of gadolinium oxide films deposited by low-pressure metalorganic chemical vapor deposition

inferredcites →https://doi.org/10.1063/1.1853522openalex-snapshot

Ca F 2 ∕ Si ∕ Ca F 2 resonant tunneling diodes grown by B surfactant-mediated epitaxy

inferredcites →https://doi.org/10.1063/1.2188051openalex-snapshot

Interface formation during molecular beam epitaxial growth of neodymium oxide on silicon

inferredcites →https://doi.org/10.1063/1.2188053openalex-snapshot

Comparison of methods for estimating continuous distributions of relaxation times

inferredcites →https://doi.org/10.1063/1.337561openalex-snapshot

Heteroepitaxy of semiconductor-on-insulator structures: Si and Ge on CaF2/Si(111)

inferredcites →https://doi.org/10.1063/1.347442openalex-snapshot

Low-temperature epitaxial growth of cerium dioxide layers on (111) silicon substrates

inferredcites →https://doi.org/10.1088/0953-8984/13/10/304openalex-snapshot

Theoretical modelling of steps on the CaF2(111) surface

inferredcites →https://doi.org/10.1103/physrevb.35.7526openalex-snapshot

Photoemission study of bonding at the CaF2 -on-Si(111) interface

inferredcites →https://doi.org/10.1103/physrevb.38.5780openalex-snapshot

Oxidation of Si(111)-(7×7) as studied by scanning tunneling microscopy

inferredcites →https://doi.org/10.1103/physrevb.62.8391openalex-snapshot

Crystallization of amorphous superlattices in the limit of ultrathin films with oxide interfaces

inferredcites →https://doi.org/10.1103/physrevb.65.115318openalex-snapshot

Absolute surface energies of group-IV semiconductors: Dependence on orientation and reconstruction

inferredcites →https://doi.org/10.1103/physrevb.69.075401openalex-snapshot

Surface properties of CeO2 from first principles

inferredcites →https://doi.org/10.1103/physrevlett.61.1756openalex-snapshot

Structure of the Si(111)-Ca F2 Interface

inferredcites →https://doi.org/10.1103/physrevlett.75.2380openalex-snapshot

Role of Step and Terrace Nucleation in Heteroepitaxial Growth Morphology: Growth Kinetics of Ca F2 /Si(111)

inferredcites →https://doi.org/10.1116/1.1319697openalex-snapshot

Initial growth analysis of Si overlayers on cerium oxide layers

inferredcites →https://doi.org/10.1116/1.1564034openalex-snapshot

Origin of crystalline quality deterioration in epitaxial growth of CeO2 layers on Si substrates

inferredcites →https://doi.org/10.1116/1.1589516openalex-snapshot

Towards understanding epitaxial growth of alternative high-K dielectrics on Si(001): Application to praseodymium oxide

inferredcites →https://doi.org/10.1116/1.1789215openalex-snapshot

Boron surfactant enhanced growth of thin Si films on CaF2∕Si

inferredcites →https://doi.org/10.1116/1.590257openalex-snapshot

Epitaxial silicon grown on CeO2/Si(111) structure by molecular beam epitaxy

inferredcites →https://doi.org/10.1143/jjap.34.l688openalex-snapshot

Room-Temperature Epitaxial Growth of CeO2 Thin Films on Si(111) Substrates for Fabrication of Sharp Oxide/Silicon Interface

inferredcites →https://doi.org/10.1143/jjap.38.l920openalex-snapshot

Resonant Tunneling Diodes in Si/CaF 2 Heterostructures Grown by Molecular Beam Epitaxy

inferredcites →https://doi.org/10.1143/jjap.40.4769openalex-snapshot

Growth of Si Thin Films on CeO2/Si(111) Substrate Using Electron-Beam Evaporation

inferredcites →https://doi.org/10.1143/jjap.42.247openalex-snapshot

Preparation and Characterization of High-kPraseodymium and Lanthanoid Oxide Thin Films Prepared by Pulsed Laser Deposition

inferredcites →https://doi.org/10.1149/1.1337607openalex-snapshot

Characterization of Gd[sub 2]O[sub 3] Films Deposited on Si(100) by Electron-Beam Evaporation

inferredcites →https://doi.org/10.1557/proc-91-337openalex-snapshot

Heteroepitaxial Si-, Ge-, and Gaas-On-Insulator Structures on Si Substrates by Use of Fluoride Insulators

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4573816openalex-extracted

Highly Oriented Crystalline Si on Epitaxial Gd2o3/Si(111) Substrate Using Low-Cost Rf Sputtering for Silicon on Insulator Application

inferred← citeshttps://doi.org/10.2139/ssrn.4841438openalex-extracted

Engineering Wafer Scale Single-Crystalline Si Growth on Epitaxial Gd2o3/Si(111) Substrate Using Rf Sputtering for Soi Application

inferred← citeshttps://doi.org/10.1002/pssa.200723509openalex-snapshot

Introducing crystalline rare‐earth oxides into Si technologies

inferred← citeshttps://doi.org/10.1007/978-1-4614-9320-4_8openalex-snapshot

Other Epitaxial Oxides on Semiconductors

inferred← citeshttps://doi.org/10.1007/978-3-642-36535-5_11openalex-snapshot

Crystalline Oxides on Silicon

inferred← citeshttps://doi.org/10.1016/j.matlet.2010.01.045openalex-snapshot

Epitaxial multi-component rare-earth oxide: A high-k material with ultralow mismatch to Si

inferred← citeshttps://doi.org/10.1016/j.mee.2007.04.092openalex-snapshot

Integration of functional epitaxial oxides into silicon: from high-k application to nanostructures

inferred← citeshttps://doi.org/10.1016/j.mee.2009.03.107openalex-snapshot

Growth temperature dependence of epitaxial Gd2O3 films on Si(111)

inferred← citeshttps://doi.org/10.1016/j.mejo.2007.11.007openalex-snapshot

Silicon in functional epitaxial oxides: A new group of nanostructures

inferred← citeshttps://doi.org/10.1016/j.mejo.2008.06.064openalex-snapshot

Integration of low dimensional crystalline Si into functional epitaxial oxides

inferred← citeshttps://doi.org/10.1016/j.tsf.2009.09.139openalex-snapshot

Single-crystalline Si grown on single-crystalline Gd2O3 by modified solid-phase epitaxy

inferred← citeshttps://doi.org/10.1016/j.tsf.2021.138732openalex-snapshot

Epitaxial Ge-Gd 2 O 3 on Si(111) substrate by sputtering for germanium-on-insulator applications

inferred← citeshttps://doi.org/10.1016/j.tsf.2023.139907openalex-snapshot

Phase evolution in epitaxial Gd2O3 due to anneal temperature for silicon on insulator application

inferred← citeshttps://doi.org/10.1016/j.tsf.2024.140272openalex-snapshot

Highly oriented crystalline si on epitaxial Gd2O3/Si(111) substrate using low-cost Radio Frequency sputtering for Silicon on Insulator application

inferred← citeshttps://doi.org/10.1016/j.tsf.2024.140529openalex-snapshot

Engineering wafer scale single-crystalline Si growth on epitaxial Gd2O3/Si(111) substrate using radio frequency sputtering for silicon on insulator application

inferred← citeshttps://doi.org/10.1016/j.tsf.2024.140559openalex-snapshot

Structural and electrical characterization of phase evolution in epitaxial Gd2O3 due to anneal temperature for silicon on insulator application

inferred← citeshttps://doi.org/10.1016/j.vacuum.2010.01.026openalex-snapshot

Epitaxial growth and thermal stability of silicon layers on crystalline gadolinium oxide

inferred← citeshttps://doi.org/10.1021/acsanm.0c03459openalex-snapshot

Three-Dimensional Integration of Functional Oxides and Crystalline Silicon for Optical Neuromorphic Computing Using Nanometer-Scale Oxygen Scavenging Barriers

inferred← citeshttps://doi.org/10.1063/1.2360209openalex-snapshot

Impact of Si substrate orientations on electrical properties of crystalline Gd2O3 thin films for high-K application

inferred← citeshttps://doi.org/10.1063/1.2746419openalex-snapshot

Investigation of the electronic structure at interfaces of crystalline and amorphous Gd2O3 thin layers with silicon substrates of different orientations

inferred← citeshttps://doi.org/10.1063/1.3003872openalex-snapshot

Band offsets between Si and epitaxial rare earth sesquioxides (RE2O3, RE=La,Nd,Gd,Lu): Effect of 4f-shell occupancy

inferred← citeshttps://doi.org/10.1063/1.3460272openalex-snapshot

Epitaxial growth and structure of (La1−xLux)2O3 alloys on Si(111)

inferred← citeshttps://doi.org/10.1063/1.4788982openalex-snapshot

X-ray diffraction and extended X-ray absorption fine structure study of epitaxial mixed ternary bixbyite PrxY2−xO3 (x = 0–2) films on Si (111)

inferred← citeshttps://doi.org/10.1063/1.4824422openalex-snapshot

Epitaxial Gd2O3 on strained Si1−xGex layers for next generation complementary metal oxide semiconductor device application

inferred← citeshttps://doi.org/10.1088/0268-1242/24/4/045021openalex-snapshot

Crystal structure and strain state of molecular beam epitaxial grown Gd 2 O 3 on Si(1 1 1) substrates: a diffraction study

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Encapsulated solid phase epitaxy of a Ge quantum well embedded in an epitaxial rare earth oxide

inferred← citeshttps://doi.org/10.1109/icm.2010.5696129openalex-snapshot

Semiconductor nanostructures in crystalline rare earth oxide for nanoelectronic device applications

inferred← citeshttps://doi.org/10.1109/nems.2009.5068613openalex-snapshot

Structural and strain relaxation study of epitaxially grown nano-thick Nd2O3/Si(111) heterostructure

inferred← citeshttps://doi.org/10.1116/1.2720858openalex-snapshot

Integration of functional epitaxial oxides into silicon: From high-K application to nanostructures

inferred← citeshttps://doi.org/10.1116/1.2905241openalex-snapshot

Growth and structural characteristics of GaN∕AlN/nanothick γ-Al2O3∕Si (111)

inferred← citeshttps://doi.org/10.1116/1.3382170openalex-snapshot

Growth and structural characterization of epitaxial (La1−xLux)2O3 layers grown on Si(111)

inferred← citeshttps://doi.org/10.1116/1.3478301openalex-snapshot

Epitaxial growth of germanium on silicon using a Gd2O3/Si (111) crystalline template

inferred← citeshttps://doi.org/10.1116/1.4882173openalex-snapshot

Monolithic integration of rare-earth oxides and semiconductors for on-silicon technology

inferred← citeshttps://doi.org/10.1186/1556-276x-7-203openalex-snapshot

Delayed crystallization of ultrathin Gd2O3 layers on Si(111) observed by in situ X-ray diffraction

inferred← citeshttps://doi.org/10.1380/ejssnt.2009.405openalex-snapshot

Development of Multi-Step Procedure for Epitaxial Growth of Crystalline Silicon on Rare-Earth-Metal Oxide for SOI-Applications

inferred← citeshttps://doi.org/10.1557/mrs2008.221openalex-snapshot

Gate Oxides Beyond SiO 2

inferred← citeshttps://doi.org/10.2320/matertrans.m2009147openalex-snapshot

Crystalline Nanoscale M2O3 (M=Gd, Nd) Thin Films Grown by Molecular Beam Epitaxy on Si(111)

inferred← citeshttps://doi.org/10.70675/0ff8e9dbz8427z44ffza5b1z8e9ee84afcf6openalex-snapshot

Dynamical and structural study of functional oxide thin layers : srTiO3, VO2 and Al2O3

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Epitaxy of crystalline oxides for functional materials integration on silicon

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