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Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer

https://doi.org/10.3390/ma14206222

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/adem.201901173openalex-snapshot

Lithography and Etching‐Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation

inferredcites →https://doi.org/10.1002/j.2161-4296.1991.tb01717.xopenalex-snapshot

Electrostatically Force-Balanced Silicon Accelerometer

inferredcites →https://doi.org/10.1007/s00158-009-0422-0openalex-snapshot

A micro-accelerometer MDO benchmark problem

inferredcites →https://doi.org/10.1007/s00542-011-1350-7openalex-snapshot

Coupled effects of gold electroplating and electrochemical discharge machining processes on the performance improvement of a capacitive accelerometer

inferredcites →https://doi.org/10.1007/s00542-013-1741-zopenalex-snapshot

Optimization of MEMS capacitive accelerometer

inferredcites →https://doi.org/10.1007/s00542-020-04776-yopenalex-snapshot

Superior performance area changing capacitive MEMS accelerometer employing additional lateral springs for low frequency applications

inferredcites →https://doi.org/10.1016/j.ceramint.2020.04.097openalex-snapshot

High speed and low roughness micromachining of silicon carbide by plasma etching aided femtosecond laser processing

inferredcites →https://doi.org/10.1016/j.sna.2007.01.008openalex-snapshot

Squeeze film air damping in MEMS

inferredcites →https://doi.org/10.1016/j.sna.2020.112159openalex-snapshot

Measuring and calibrating of the parasitic mismatch in MEMS accelerometer based on harmonic distortion self-test

inferredcites →https://doi.org/10.1016/s0924-4247(99)00335-0openalex-snapshot

Silicon carbide as a new MEMS technology

inferredcites →https://doi.org/10.1039/d0ra06919aopenalex-snapshot

SiC mesoporous membranes for sulfuric acid decomposition at high temperatures in the iodine–sulfur process

inferredcites →https://doi.org/10.1049/mnl.2011.0120openalex-snapshot

Micromachined inertial measurement unit fabricated by a SOI process with selective roughening under structures

inferredcites →https://doi.org/10.1049/mnl.2019.0566openalex-snapshot

Simulation study on squeeze film air damping

inferredcites →https://doi.org/10.1063/1.5120083openalex-snapshot

Optimal design of SiC piezoresistive pressure sensor considering material anisotropy

inferredcites →https://doi.org/10.1063/1.556000openalex-snapshot

Material Properties of a Sintered α-SiC

inferredcites →https://doi.org/10.1063/5.0006830openalex-snapshot

The piezoresistive mobility modeling for cubic and hexagonal silicon carbide crystals

inferredcites →https://doi.org/10.1063/5.0019296openalex-snapshot

Amplitude-modulated resonant accelerometer employing parametric pump

inferredcites →https://doi.org/10.1080/0950083021000022288openalex-snapshot

Indentation hardnesses of semiconductors and a scaling rule

inferredcites →https://doi.org/10.1088/0960-1317/26/2/025005openalex-snapshot

A novel sandwich differential capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure

inferredcites →https://doi.org/10.1088/1361-6439/ab92ebopenalex-snapshot

Investigation of drift phenomena in closed-loop capacitive micro accelerometers

inferredcites →https://doi.org/10.1088/1742-6596/917/8/082007openalex-snapshot

Design and technology optimization of SiC-based RF MEMS switch

inferredcites →https://doi.org/10.1093/ageing/afi192openalex-snapshot

Accelerometers in rehabilitation medicine for older adults

inferredcites →https://doi.org/10.1108/02602280910986557openalex-snapshot

Fabrication of a MEMS accelerometer to detect heart bypass surgery complications

inferredcites →https://doi.org/10.1108/sr-09-2017-0199openalex-snapshot

UV-induced photosensing characteristics of SiC and GaN nanowires

inferredcites →https://doi.org/10.1109/23.736528openalex-snapshot

Radiation response of a MEMS accelerometer: an electrostatic force

inferredcites →https://doi.org/10.1109/7.976972openalex-snapshot

Reconfigurable NDI controller using inertial sensor failure detection & isolation

inferredcites →https://doi.org/10.1109/iraniancee.2016.7585757openalex-snapshot

A 3-axis MEMS capacitive accelerometer free of cross axis sensitivity

inferredcites →https://doi.org/10.1109/iraniancee.2017.7985093openalex-snapshot

Designing a new high performance 3-axis MEMS capacitive accelerometer

inferredcites →https://doi.org/10.1109/iscas.2011.5937993openalex-snapshot

A monolithic CMOS MEMS accelerometer with chopper correlated double sampling readout circuit

inferredcites →https://doi.org/10.1109/jmems.2002.805043openalex-snapshot

Self-balanced navigation-grade capacitive microaccelerometers using branched finger electrodes and their performance for varying sense voltage and pressure

inferredcites →https://doi.org/10.1109/jproc.2009.2013612openalex-snapshot

Review: Semiconductor Piezoresistance for Microsystems

inferredcites →https://doi.org/10.1109/jsen.2020.2998915openalex-snapshot

Toward a Self-Sensing Piezoresistive Pressure Sensor for All-SiC Monolithic Integration

inferredcites →https://doi.org/10.1109/t-ed.1979.19795openalex-snapshot

A batch-fabricated silicon accelerometer

inferredcites →https://doi.org/10.1109/tbme.2019.2924689openalex-snapshot

A Wearable Human Motion Tracking Device Using Micro Flow Sensor Incorporating a Micro Accelerometer

inferredcites →https://doi.org/10.1109/ted.2020.3019230openalex-snapshot

The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System

inferredcites →https://doi.org/10.1126/science.279.5357.1672openalex-snapshot

The Structure of the Upper Atmosphere of Mars: In Situ Accelerometer Measurements from Mars Global Surveyor

inferredcites →https://doi.org/10.1149/05006.0233ecstopenalex-snapshot

Wide Bandgap Semiconductors for Sensing Within Extreme Harsh Environments

inferredcites →https://doi.org/10.2486/indhealth.35.222openalex-snapshot

Trunk Rotation Monitor Using Angular Velocity Sensors.

inferredcites →https://doi.org/10.2514/6.2001-4288openalex-snapshot

The pendulous integrating gyroscope accelerometer (PIGA) from the V-2 to trident D5, the strategic instrument of choice

inferredcites →https://doi.org/10.3233/jifs-169070openalex-snapshot

Design and realization of two-wheel micro-mouse diagonal dashing

inferredcites →https://doi.org/10.3390/mi11090799openalex-snapshot

Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

inferredcites →https://doi.org/10.3390/s20061780openalex-snapshot

Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams

inferredcites →https://doi.org/10.3390/s20133652openalex-snapshot

An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer

inferredcites →https://doi.org/10.3390/s20144054openalex-snapshot

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

inferredcites →https://doi.org/10.3390/s20247033openalex-snapshot

Viaxl: A Solution of a Low-Cost Real-Time Visual Accelerometer Based on Laser Speckle Optical Flow Detection

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4051374openalex-extracted

Fabrication and Performance of a Bulk 4h-Sic Mems Piezoresistive Accelerometer

inferred← citeshttps://doi.org/10.1002/tee.23944openalex-snapshot

A MEMS All‐SiC Accelerometer and its Application in Vibration Test of Aero‐Engine †

inferred← citeshttps://doi.org/10.1016/j.mee.2022.111793openalex-snapshot

Design, fabrication and test of a bulk SiC MEMS accelerometer

inferred← citeshttps://doi.org/10.1016/j.mssp.2024.108137openalex-snapshot

Application of bulk silicon carbide technology in high temperature MEMS sensors

inferred← citeshttps://doi.org/10.1016/j.mtcomm.2026.116128openalex-snapshot

Material modelling and dynamic analysis of functionally graded-MEMS accelerometer subjected to thermal shock loads

inferred← citeshttps://doi.org/10.1109/mdp60436.2023.10424173openalex-snapshot

Modeling and Analysis of the Functioning of the Sensitive Element of a Capacitive Microaccelerometer Based on the Microstructure of Silicon Carbide(Sic) and Silicon(Si)

inferred← citeshttps://doi.org/10.3390/electronicmat7030021openalex-snapshot

4H-SiC MEMS Accelerometer with Integrated SiC-FET Readout for High Temperature Harsh Environment: Design and System-Level Simulation

inferred← citeshttps://doi.org/10.3390/ma15134692openalex-snapshot

Study on the Dynamic Characteristics of a SiC-Based Capacitive Micro-Accelerometer in Rarefied Air

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